
AI Series Circulating Air Refrigeration Unit
애플리케이션
Applied to high and low temperature testing of semiconductor equipment. Electronic equipment high and low temperature constant temperature test cold and heat source; independent refrigeration cycle fan unit; can work continuously for a long time, automatic defrosting, and the defrosting process does not affect the storage temperature.
제품 특징
제품 매개변수
AI -105℃~+125℃
모델 | AI-6535 AI-6535W |
AI-8035W | AI-1055W | |
온도 범위 | -65℃~+125℃ | -80℃~+125℃ | -105℃~+125℃ | |
제어 모드 | PID Adaptive controller | |||
통신 프로토콜 | MODBUS RTU 프로토콜, RS 485 인터페이스 | |||
온도 피드백 | PT100 | |||
조작 패널 | 7-inch touch screen, show temp. curve/ EXCEL date output | |||
온도 정확도 | ±0.05℃(Steady state outlet temperature) | |||
난방 전력 | 3.5KW | 3.5kW | 3.5kW | |
냉각 용량 |
125℃ | 3.5KW | 3.5kW | 3.5kW |
50℃ | 3.5kW | 3.5kW | 3.5kW | |
20℃ | 3.5kW | 3.5kw | 3.5kw | |
0℃ | 3.5kW | 3.5kw | 3.5kw | |
-20℃ | 3kW | 3.5kW | 3.5kW | |
-40℃ | 2.1KW | 2.5kW | 3.5kW | |
-60℃ | 1KW | 2.1kw | 3kw | |
-75℃ | 1kw | 2kw | ||
-95 | 1KW | |||
Circulating air flow | 550m³/h | |||
Inlet and outletair intertace | DN125 | |||
압축기 | Emerson Copeland scroll flexible compressor | |||
안전 보호 | Self-diagnosis function; Phase sequence protection. freezer overload protection; high pressure switch. overload relay. thermal protection device. |
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Defrosting device | There are installed defrosting device and condensate drain inside | |||
Continuous running | Running continuously | |||
Timing operation | Can set timed start and stop time | |||
냉매 | R404A R23 | R404A R508B | R404A R23 R14 | |
Water-cooled | 1200L/H 1.5bar~4bar | 1600L/H 1.5bar~4bar | 2600L/H 1.5bar~4bar | |
치수 cm | 55*100*175 | 55*100*175 | 70*100*175 | |
무게 | 280kg | 300kg | 360kg | |
셸 재질 | Cold rolled sheet spray coating REL 7035 |
1. Widely used in high and low temperature testing of semiconductor equipment.Cold and heat source of electronic equipment at high temperature and low temperature;
2. Independent refrigeration circulating air units;
3. Can work continuously for a long time, automatic defrosting, defrosting process does not affect the storage temperature;
4. Modular design, easy replacement of spare machine (if there are 10 machines, as long as a standby unit can);
5. Solve frequent open and close doors, evaporating system frosting problems;Evaporation system defrosting process does not affect.
6. Construct a set of high and low temperature and constant greenhouse (according to the drawings provided, the box can be joined together like building blocks to connect the electricity and water and set the temperature to work)
Product Advantages
- 효율적인 생산 안정성 및 반복성 결과;
- 판형 열교환기와 파이프라인 히터를 사용하여 냉각 및 난방 속도를 개선합니다;
- 매우 넓은 온도 범위로 액체 매체를 교체할 필요가 없습니다;
- 완전 밀폐형 시스템으로 열 전도성 액체의 수명을 연장합니다;
- 마그네틱 드라이브 펌프를 채택하여 샤프트 씰 누수 문제가 없습니다;
- 고온 냉각 기술, 압축기를 직접 시동하여 300℃에서 냉각합니다.
가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.


client output signal
Communication function
애플리케이션
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
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Why choose lneya as your temperature control supplier?
Years of experience
Satisfied Customers
m² Production Area
Patented Technologies