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AI Series Circulating Air Refrigeration Unit

AI Series Circulating Air Refrigeration Unit

애플리케이션

Applied to high and low temperature testing of semiconductor equipment. Electronic equipment high and low temperature constant temperature test cold and heat source; independent refrigeration cycle fan unit; can work continuously for a long time, automatic defrosting, and the defrosting process does not affect the storage temperature.

AI -105℃~+125℃

 

모델 AI-6535
AI-6535W
AI-8035W AI-1055W
온도 범위 -65℃~+125℃ -80℃~+125℃ -105℃~+125℃
제어 모드 PID Adaptive controller
통신 프로토콜 MODBUS RTU 프로토콜, RS 485 인터페이스
온도 피드백 PT100
조작 패널 7-inch touch screen, show temp. curve/ EXCEL date output
온도 정확도 ±0.05℃(Steady state outlet temperature)
난방 전력 3.5KW 3.5kW 3.5kW
냉각
용량
125℃ 3.5KW 3.5kW 3.5kW
50℃ 3.5kW 3.5kW 3.5kW
20℃ 3.5kW 3.5kw 3.5kw
0℃ 3.5kW 3.5kw 3.5kw
-20℃ 3kW 3.5kW 3.5kW
-40℃ 2.1KW 2.5kW 3.5kW
-60℃ 1KW 2.1kw 3kw
-75℃ 1kw 2kw
-95 1KW
Circulating air flow 550m³/h
Inlet and outletair intertace DN125
압축기 Emerson Copeland scroll flexible compressor
안전 보호 Self-diagnosis function; Phase sequence protection. freezer overload protection; high pressure switch.
overload relay. thermal protection device.
Defrosting device There are installed defrosting device and condensate drain inside
Continuous running Running continuously
Timing operation Can set timed start and stop time
냉매 R404A R23 R404A R508B R404A R23 R14
Water-cooled 1200L/H  1.5bar~4bar 1600L/H 1.5bar~4bar 2600L/H 1.5bar~4bar
치수 cm 55*100*175 55*100*175 70*100*175
무게 280kg 300kg 360kg
셸 재질 Cold rolled sheet spray coating REL 7035

 

 

1. Widely used in high and low temperature testing of semiconductor equipment.Cold and heat source of electronic equipment at high temperature and low temperature;

2. Independent refrigeration circulating air units;

3. Can work continuously for a long time, automatic defrosting, defrosting process does not affect the storage temperature;

4. Modular design, easy replacement of spare machine (if there are 10 machines, as long as a standby unit can);

5. Solve frequent open and close doors, evaporating system frosting problems;Evaporation system defrosting process does not affect.

6. Construct a set of high and low temperature and constant greenhouse (according to the drawings provided, the box can be joined together like building blocks to connect the electricity and water and set the temperature to work)

 

 

가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.

Communication function

애플리케이션

반도체 FAB 공정의 온도 제어 장치

반도체 제조는 환경 요건이 매우 까다로운 공정으로, 많은 공정 단계가 온도에 매우 민감합니다.
정밀한 온도 제어를 통해 증착된 필름의 균일한 두께와 정확한 구성을 보장하여 칩 성능과 수율을 향상시킬 수 있습니다.

반도체 패키징 및 테스트 공정용

반도체 패키징 및 테스트 공정은 웨이퍼 테스트, 칩 패키징, 패키징 후 테스트 등 반도체 생산 공정의 핵심 연결고리입니다. 이 공정은 높은 수준의 정확성과 신뢰성뿐만 아니라 제품 품질과 성능을 보장하기 위해 엄격한 온도 관리가 필요합니다.

Such as chillers that control the processing temperature on the Fab equipments.

Cooling of CMOS/CCD sensors in semiconductor metrology systems.

Recirculating Chiller for semiconductor metering AOI system.

주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.

Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.


Since our founding in 2006, we have served over 30,000 customers and hold several patents that demonstrate our innovation and reliability. Our chillers are selected for over 100 university laboratory projects worldwide and exported to over 20 countries. We ensure the highest quality through a rigorous 3-step quality control process: visual inspection, performance testing, and electrical safety testing. Our commitment to excellence is further backed by our 24/7 customer support commitment. In addition, we have agents in the United States, Canada, Australia, Russia, and South Korea, making us a global, trusted partner for your chiller needs. Choose lneya for quality and support for your project.
18+

Years of experience

30000+

Satisfied Customers

25000

m² Production Area

80+

Patented Technologies

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