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열 냉각기
FLTZ -25℃~90℃
LNEYA thermal chillers are designed for demanding temperature control applications and helps you with your business with professional technology.
The Leader in Semiconductor Chiller Solutions
fltz series
-25°C
최저
90°C
최고
±0.1°C
온도 제어 정확도
Contact LNEYA sales engineer for catalog or price.
| FLTZ | 202/202W~215/215W | ||
| 온도 범위 | -25℃～90℃ | ||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||
| 흐름 제어 | 10~75L/min | ||
| Cooling capacity @-15℃ | 2kW~15kW | ||
| Internal circulating fluid volume | 4L~20L | ||
| 확장 탱크 용량 | 10L~35L | ||
| 냉매 | R404A | ||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||
| 냉각수 흐름 @20℃ | 1.2m³/H~10.2m³/H | ||
| 치수 cm | 950*380*1055~1080*600*1500 | ||
Wafer cleaning
• The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
Photolithography
• Specific constant temperature environment must be maintained after photoresist coating.
Etching
• During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
높은 정밀도와 높은 효율성을 보장하는 열쇠
Semiconductor FAB process temperature control technology
thermal chiller is widely used in semiconductor application scenarios that require two-way temperature control due to its wide temperature range.
Wafer cleaning requires the use of chemical liquids such as SC1 (ammonia + hydrogen peroxide) and SC2 (hydrochloric acid + hydrogen peroxide) to clean the wafer, and the reaction temperature must be stably controlled at 25℃-80℃,The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
DUV/EUV lithography machines are extremely sensitive to temperature fluctuations, so a specific constant temperature environment must be maintained after photoresist coating. Semiconductor chillers can provide a constant temperature environment for lithography machines.
높은 정밀도와 높은 효율성을 보장하는 열쇠
The key role of thermal testing in semiconductor packaging and testing
During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
In addition, semiconductor back-end processes such as metal interconnection, packaging, and testing have strict requirements on temperature uniformity and require the help of thermal chillers.
Other models for semiconductor industry
Process chillers
Temp range -25~90℃
온도 정확도 ±0.05℃
Low temperature chillers
Temp range -45~90℃
온도 정확도 ±0.05℃
Recirculating water chillers
Temp range -80~90℃
온도 정확도 ±0.05℃
Recirculation chillers
Temp range -100~90℃
온도 정확도 ±0.05℃
You can Visit our factory
Served more than 30,000 customers.Exported to more than 20 countries.Agents in the United States, Canada, Australia, Russia, South Korea and other countries.
Get in touch with our Thermal chiller experts
Contact us now to get chiller details and prices
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