Thermal Chillers for Semiconductor ATE & Process

Advanced liquid temperature control technology, actively exploring and researching component test systems, mainly used for temperature test simulation in pharmaceutical chemicals, new energy, semiconductors, and aerospace testing, with wide temperature direction and high temperature rise and fall, temperature range: -80°C~+90°C, temperature control accuracy up to: ±0.05℃, suitable for various test requirements.

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애플리케이션

Temperature control system for production process and testing links.
Applied in semiconductors, LEDs, LCDs, solar photovoltaics and other fields;
The variable frequency pump can adjust the circulating fluid pressure and flow, Circulation heating can be achieved without a heater;
Multi-channel independent temperature control, no mutual influence.

Such as chillers that control the processing temperature on the Fab equipments.

Cooling of CMOS/CCD sensors in semiconductor metrology systems.

Recirculating Chiller for semiconductor metering AOI system.

주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.

Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.

FLTZ 주파수 변환 시리즈

Temperature control range: -45℃～+90℃

The chiller’s exhaust and suction temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank level and other important information are all connected to the control system through sensors for comprehensive management, monitoring and recording.

Inquiry @ sales@cnzlj.com

모델	5℃～90℃	-25℃～90℃	-45℃～90℃	-80℃～+90℃	-100℃～+90℃
온도 제어 정확도	±0.05℃	±0.05℃	±0.05℃	±0.05℃	±0.05℃
냉각 용량	6KW~40KW @10℃	2KW~15KW @-15℃	1KW~8KW @-35℃	0.6KW~3KW @-70℃	1.5KW~3KW @-90℃

Rated test conditions for all equipment: Dry bulb temperature: 20℃; Wet bulb temperature: 16℃. Inlet water temperature: 20℃; Outlet water temperature: 25℃.

FLTZ Frequency Conversion Multi-channel Series

Temperature control range: -45℃～+100℃

Multi channel independent temperature control, which can have a separate temperature range, cooling and heating capacity, thermal conductivity medium flow rate, etc., adopts two independent systems.

The system can be used for universal expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and operation steps.

Inquiry @ sales@cnzlj.com

모델	-20℃～+90℃	-45℃～+80℃	-10℃～+80℃	-25℃～+100℃
파이프라인	channel 2	channel 2	channel 3	channel 3
온도 제어 정확도	±0.1℃	±0.1℃	±0.1℃	±0.1℃
냉각 용량	4kW@-10℃	11kW@-20℃ 5kW@-40℃	4kW@-10℃/21kW@+20℃	13kW@PCW+15℃
난방 용량	2kW	2kW	4.5+6kW	6kW

모델	FLTZ-203W/2T 듀얼 시스템		FLTZ-305W/2T 듀얼 시스템		FLTZ-406W/2T 듀얼 시스템
온도 범위	-20℃~90℃		-30℃~90℃		-45℃~90℃
온도 제어 정확도	±0.1℃
열 전도성 매체 유량	최대 15~45L/min 6bar
난방 용량	2.5kW	2.5kW	2.5kW	2.5kW	3.5kW	3.5kW
냉각 용량	3kW @-15℃	3kW @-15℃	5kW @-15℃	5kW @-15℃	2.5kW @-35℃	2.5kW @-35℃

Rated test conditions for all equipment: dry bulb temperature: 20℃; wet bulb temperature: 16℃. Inlet water temperature: 20℃; outlet water temperature: 25℃.

ETCU Heat Exchange Chiller Series

Adopting compressor-free refrigeration system

temperature control range is: 5℃～+90℃

temperature control accuracy: ±0.05℃

Inquiry @ sales@cnzlj.com

모델	ETCU-005W	ETCU-015W	ETCU-030W	ETCU-050W	ETCU-100W	ETCU-200W	ETCU-300W
온도 범위	Cooling water temperature +5℃~90℃
온도 제어 정확도	±0.05℃（Steady state outlet temperature）
냉각수 온도	7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves
냉각 용량	5kW	15kW	30kW	50kW	100kW	200kW	300kW

Rated test conditions for all equipment: dry bulb temperature: 20℃; wet bulb temperature: 16℃. Inlet water temperature: 20℃; outlet water temperature: 25℃.

AES Series Thermal Stream

Thermal Solutions for ATE testing

temperature control range is: -115℃~225℃

temperature control accuracy: ±0.1℃

Inquiry @ sales@cnzlj.com

모델	AES-4535 AES-4535W	AES-6035 AES-6035W	AES-8035 AES-8035W	AES-A1035W	AES-A1235W
온도 범위	-40℃～225℃	-60℃～225℃	-80℃～225℃	-100℃～225℃	-120℃～225℃
온도 정확도	±0.1℃（Steady state outlet temperature）
Air requirements	Air filter < 5um air oil content < 0.1um air temp and humidity：5℃-32℃ 0-50%RH
Air treatment capacity	10m³/h-m³/h pressure 5bar-7.6bar

Contact LNEYA technical engineer for model selection

Wechat 18914253067

Whatsapp 86-13912479193

Fab 장비의 처리 온도를 제어하는 냉각기

advantages

효율적인 생산 안정성 및 반복성 결과;
판형 열교환기와 파이프라인 히터를 사용하여 냉각 및 난방 속도를 개선합니다;
매우 넓은 온도 범위로 액체 매체를 교체할 필요가 없습니다;
완전 밀폐형 시스템으로 열 전도성 액체의 수명을 연장합니다;
마그네틱 드라이브 펌프를 채택하여 샤프트 씰 누수 문제가 없습니다;
고온 냉각 기술, 압축기를 직접 시동하여 300℃에서 냉각합니다.

가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.

Heating function

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

Communication function

Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.

client output signal

Customized Chiller Solutions

요청을 제출하시면 24시간 이내에 연락드리겠습니다.

동적 온도 제어 시스템 (Biochemistry Pharmaceutical Process)

온도 제어 :-120℃~350℃

Temperature control for high pressure reactor；Double-layer glass reactor；Double-layer reactor；Microchannel Reactor；Distillation system；Material aging test；Vacuum chamber etc.

온도 제어 흐름 시스템 제어(차량/배터리 팩 테스트)

온도 제어: -40℃~100℃

온도 시뮬레이션 배터리 수명 테스트, 연료 인젝터/모터 테스트 벤치, 에어백 테스트, 부품 테스트 벤치 등 차량 품질 테스트에 사용됩니다. 기후 챔버의 외부 환경 조건을 시뮬레이션하거나 내부 시스템을 대체하여 테스트 벤치에 필요한 실제 온도 조건을 만들 수 있습니다.