LNEYA 산업용 냉각기 제조업체 공급 업체
ETCU Series Heat Exchange Chiller without compressor
애플리케이션
Multi-channel independent temperature control can have independent temperature range, cooling and heating capacity, heat transfer medium flow, etc., using two independent systems, choose steam compression refrigeration according to the required temperature range, or use ETCU compressor-free heat exchange system, the system can use expansion tank, condenser, cooling water system, etc., which can effectively reduce the size of equipment and reduce the operation steps.
제품 매개변수
| 모델 | ETCU-005W | ETCU-015W | ETCU-030W | ETCU-050W | ETCU-100W | ETCU-200W | ETCU-300W |
| 온도 범위 | Cooling water temperature +5℃~90℃ | ||||||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||||||
| 냉각수 온도 | 7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves | ||||||
| 냉각 용량 | 5kW | 15kW | 30kW | 50kW | 100kW | 200kW | 300kW |
| Test conditions: When the maximum circulation amount, the temperature difference between the temperature control temperature and the cooling water temperature is 15℃ |
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| 순환 펌프 | 7~20L/min 5bar | 15~40L/min 5bar | 20~60L/min 5bar | 40~110L/min 5bar | 150~250L/min 5bar | 250~500L/min 5bar | 400~650L/min 5bar |
| 탱크 용량 | 5L | 10L | 20L | 30L | 60L | 120L | 240L |
| 치수 mm | 480*750*390 | 480*750*390 | 480*750*500 | Customization | Customization | Customization | Customization |
Product Advantages
- 효율적인 생산 안정성 및 반복성 결과;
- 판형 열교환기와 파이프라인 히터를 사용하여 냉각 및 난방 속도를 개선합니다;
- 매우 넓은 온도 범위로 액체 매체를 교체할 필요가 없습니다;
- 완전 밀폐형 시스템으로 열 전도성 액체의 수명을 연장합니다;
- 마그네틱 드라이브 펌프를 채택하여 샤프트 씰 누수 문제가 없습니다;
- 고온 냉각 기술, 압축기를 직접 시동하여 300℃에서 냉각합니다.
애플리케이션
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.
client output signal
Communication function
LNEYA provides customized services
custom ETCU sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom ETCU types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom ETCU voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
