LNEYA 산업용 냉각기 제조업체 공급 업체-.
FLTZ Variable Frequency Series Chiller for Semiconductor Industry
애플리케이션
Semiconductor temperature control unit Chiller is mainly used for precise temperature control in the semiconductor production process and testing process. The company applies multiple algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.
제품 매개변수
FLTZ 5℃～90℃
| 모델 | 002 002W |
003 003W |
004 004W |
006 006W |
008 008W |
010 010W |
015 015W |
| 온도 범위 | 5℃～90℃ | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| 연결 크기 | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| 냉각수 흐름 @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| 치수 cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
FLTZ -25℃～90℃
| 모델 | FLTZ-202 FLTZ-202W |
FLTZ-203 FLTZ-203W |
FLTZ-204 FLTZ-204W |
FLTZ-206 FLTZ-206W |
FLTZ-208 FLTZ-208W |
FLTZ-210 FLTZ-210W |
FLTZ-215 FLTZ-215W |
| 온도 범위 | -25℃～90℃ | ||||||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||||||
| 흐름 제어 | 10~25L/min | 15～45L/min | 25～75L/min | ||||
| Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| 연결 크기 | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
| 냉각수 흐름 @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
| 치수 cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| 공정 온도 제어 | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -45℃～90℃
| 모델 | FLTZ-402 FLTZ-402W |
FLTZ-403 FLTZ-403W |
FLTZ-404 FLTZ-404W |
FLTZ-406 FLTZ-406W |
FLTZ-408 FLTZ-408W |
FLTZ-410 FLTZ-410W |
FLTZ-415 FLTZ-415W |
| 온도 범위 | -45℃～90℃ | ||||||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||||||
| 흐름 제어 | 10～25L/min 5bar max | 15～45L/min 5bar max | 25～75L/min 5bar max | ||||
| 난방 | Using compressor heating, prevent condenser frosting technology | ||||||
| Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| 연결 크기 | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| 냉각수 흐름 @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
| 치수 cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*500*1500 | 1080*500*1500 |
| 공정 온도 제어 | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -80℃～+90℃
| 모델 | FLTZ-803W | FLTZ-805W | FLTZ-806W | FLTZ-808W | FLTZ-810W |
| 온도 범위 | -80℃～+90℃ | ||||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||||
| 흐름 제어 | 7～25L/min 5bar max | 12～45L/min 6bar max | |||
| Cooling capacityat-70℃ | 0.6kW | 1kW | 1.5kW | 2kW | 3kW |
| 난방 용량 | 2kW | 2kW | 2kW | 3.5kW | 3.5kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L |
| Heat-conduction medium | 불소화 액체 | ||||
| 연결 크기 | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water@20℃ | 1.8m3/h | 2.5m3/h | 3m3/h | 5m3/h | 6m3/h |
| 회로 차단기 | 25A | 25A | 32A | 40A | 50A |
| 치수 cm | 550*700*1750 | 650*850*1850 | 700*850*1850 | 700*850*1850 | 800*1200*1850 |
| 공정 온도 제어 | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -100℃～+90℃
| 모델 | FLTZ-1002W | FLTZ-1004W |
| 온도 범위 | -100℃～+90℃ | |
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | |
| 흐름 제어 | 7~25L/min | 12~45L/min |
| Cooling capacityat-90℃ | 1.5kW | 3kW |
| 난방 용량 | 3.5kW | 5.5kW |
| Internal circulating fluid volume | 5L | 8L |
| 확장 탱크 용량 | 10L | 15L |
| Heat-conduction medium | 불소화 액체 | |
| 연결 크기 | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG1 |
| Cooling water@20℃ | 50L/min 2bar~7bar | 100L/min 2bar~7bar |
| 회로 차단기 | 32A | 63A |
| 공정 온도 제어 | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
|
Product Advantages
- 효율적인 생산 안정성 및 반복성 결과;
- 판형 열교환기와 파이프라인 히터를 사용하여 냉각 및 난방 속도를 개선합니다;
- 매우 넓은 온도 범위로 액체 매체를 교체할 필요가 없습니다;
- 완전 밀폐형 시스템으로 열 전도성 액체의 수명을 연장합니다;
- 마그네틱 드라이브 펌프를 채택하여 샤프트 씰 누수 문제가 없습니다;
- 고온 냉각 기술, 압축기를 직접 시동하여 300℃에서 냉각합니다.
가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.
client output signal
Communication function
애플리케이션
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
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Why choose lneya as your temperature control supplier?
18+
Years of experience
30000+
Satisfied Customers
25000
m² Production Area
80+
Patented Technologies
