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Dr Series Gas Dryer

Dr Series Gas Dryer

애플리케이션

Use in sensors, semiconductor manufacturing, film and packaging material licenses, powder material transportation, spraying systems, food industry, pharmaceutical industry, etc. require distributed air sources with low dew point of -80℃ dry and clean.

Mode DR-300 DR-600 DR-1200
압력 범위  0.65~1.0Mpa
이슬점 온도  -70℃
Gas processing capacity 425L/분 900L/분 1750L/분
완성된 가스 볼륨 300L/분 600L/분 1200L/분
연결 크기 ZG1/2 ZG1/2 ZG3/4
전원 220V 15W
치수 cm 200*180*1250 450*180*1250 450*180*1250

 

Distributed gas sources used in sensors, semiconductor manufacturing, film and packaging material licensing, powder material transportation, spraying systems, food industry, pharmaceutical industry, etc. that require -80℃ low dew point drying and cleaning.

Additional filtration of oil and particulate matter, with airflow passing through a filtration level of 0.01 μm, the pre filter prevents the desiccant from being contaminated by dust and oil (which greatly shortens the lifespan of the desiccant).

The compressed air dryer consists of multiple sets of filter cartridges filled with desiccants. The compressed air in the form of mist alternately flows through multiple sets of filter elements, and the moisture in the air will accumulate on the surface of the dryer. After the filtration process reaches a predetermined duration, the airflow will switch to other filter elements, and a portion of the airflow (discharge airflow) will be used to regenerate the dryer of the first filter element. The flushing airflow will be released into the atmosphere. The service life of desiccants is approximately 15000 working hours.

가변 주파수 펌프는 순환 유압 및 유량을 조절할 수 있습니다.

Communication function

애플리케이션

반도체 FAB 공정의 온도 제어 장치

반도체 제조는 환경 요건이 매우 까다로운 공정으로, 많은 공정 단계가 온도에 매우 민감합니다.
정밀한 온도 제어를 통해 증착된 필름의 균일한 두께와 정확한 구성을 보장하여 칩 성능과 수율을 향상시킬 수 있습니다.

반도체 패키징 및 테스트 공정용

반도체 패키징 및 테스트 공정은 웨이퍼 테스트, 칩 패키징, 패키징 후 테스트 등 반도체 생산 공정의 핵심 연결고리입니다. 이 공정은 높은 수준의 정확성과 신뢰성뿐만 아니라 제품 품질과 성능을 보장하기 위해 엄격한 온도 관리가 필요합니다.

Such as chillers that control the processing temperature on the Fab equipments.

Cooling of CMOS/CCD sensors in semiconductor metrology systems.

Recirculating Chiller for semiconductor metering AOI system.

주로 에칭 장비용으로 설계된 단일 채널 공랭식 쿨러입니다. 챔버 측벽에 독립적인 온도 제어를 제공하는 데 사용됩니다.

Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.


Since our founding in 2006, we have served over 30,000 customers and hold several patents that demonstrate our innovation and reliability. Our chillers are selected for over 100 university laboratory projects worldwide and exported to over 20 countries. We ensure the highest quality through a rigorous 3-step quality control process: visual inspection, performance testing, and electrical safety testing. Our commitment to excellence is further backed by our 24/7 customer support commitment. In addition, we have agents in the United States, Canada, Australia, Russia, and South Korea, making us a global, trusted partner for your chiller needs. Choose lneya for quality and support for your project.
18+

Years of experience

30000+

Satisfied Customers

25000

m² Production Area

80+

Patented Technologies

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