LTS -20℃~80℃ Fluoride cooling and heating system

Temperature control during semiconductor manufacturing

흐름 제어12L/min~45L/min
Internal circulating liquid4L~10L
확장 탱크10L~20L
원산지중국

동적 온도 제어 시스템 불소화 액체 온도 제어 LTS 시리즈 반도체 테스트 냉각기

제품 데이터 다운로드

manual.pdf

세부 매개 변수

모델	LTS-202	LTS-203	LTS-204	LTS-206	LTS-208
	LTS-202W	LTS-203W	LTS-204W	LTS-206W	LTS-208W
온도 범위	-20℃～35℃
온도 제어 정확도	±0.1℃ at -20℃～0℃
흐름 제어	7~25L/min		12~45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
확장 탱크 용량	10L	10L	15L	15L	20L
시스템 압력 표시	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
컨트롤러	PLC, 퍼지 PID 제어 알고리즘, 캐스케이드 제어 알고리즘 포함
Temperature control	열전달 매체 출구 온도 제어 모드
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
계약서	이더넷 인터페이스 TCP/IP 프로토콜
	RS485 인터페이스 모드버스 RTU 프로토콜
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
폐쇄형 순환 시스템	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
압축기	Emerson Copeland/Danfoss Scroll Flexible Compressor
순환 펌프	Magnetic circulation pump
증발기	판형 열교환기
콘덴서	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
냉장 액세서리	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
조작 패널	LNEYA 맞춤형 7인치 컬러 터치 스크린, 온도 곡선 디스플레이\EXCEL 데이터 내보내기
보안	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
인/아웃 인터페이스 크기	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4

제품 설명

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
온도 샘플링 및 응답 속도를 최적화하고 제어 알고리즘을 특별히 설계하여 안정적인 온도 제어에 신속하게 대응할 수 있습니다.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

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