LNEYA 산업용 냉각기 제조업체 공급 업체
Semiconductor FAB Process Temperature Control
LNEYA has rich experience in temperature control of semiconductor industry products, and its products cover various process temperature control such as lithography, etching, thin film deposition, polishing, etc.
Products include: high-precision chiller heater, low-temperature Chiller, compressor-free heat exchange unit, etc., with temperature control accuracy up to ±0.05℃
해결 방법
솔루션
반도체 제조는 환경적으로 매우 까다로운 공정이며, 많은 공정 단계가 온도에 매우 민감합니다.
For example, in the photolithography process, the optical system of the photolithography machine needs to work in a stable temperature environment, because a slight change in temperature may cause deviations in the optical path, which in turn affects the accuracy of the photolithography. In processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), the reaction temperature directly affects the quality and performance of the film. Accurate temperature control can ensure that the deposited film has uniform thickness and accurate composition, thereby improving the performance and yield of the chip.
FLTZ Variable Frequency Chiller
-온도 제어 정확도 ±0.05℃(출구 온도 정상 상태)
반도체 생산 및 테스트 공정에서 정밀한 온도 제어에 주로 사용되는 -90~+100℃. 이 회사는 시스템에 다양한 알고리즘을 적용하여 빠른 시스템 응답과 높은 제어 정확도를 달성합니다.
LT 고정 주파수 시리즈
—Compressor cascade refrigeration,low temperature -80℃
LNEYA 냉동 냉각기 온도 범위는 -80 ℃ ~ -5 ℃이며, 2 차 과냉각 기술, 급속 냉각을 사용합니다. 강력한 제품 신뢰성과 뛰어난 성능.
Chiller Heat Exchange Series
—No compressor is used
ETCU 압축기가 없는 열교환 시스템인 이 시스템은 범용 팽창 탱크, 응축기, 냉각수 시스템 등이 될 수 있어 장비의 크기를 효과적으로 줄이고 작동 단계 수를 줄일 수 있습니다.
ZLTZ High-efficiency Heat Exchange Chiller
—Automatically recover heat transfer medium
Combined with microchannel reactors for high exothermic temperature control, the heat transfer efficiency is more than 5 times that of heat transfer oil under the same flow rate conditions. At the same time, the inlet and outlet temperature difference is small, and the temperature field is highly uniform, which is particularly suitable for applications with violent exothermic reactions.
