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Single channel chillers
FLTZ -45℃~90℃
FLTZ single channel chiller easily achieves independent and precise temperature control for multiple fluid channels, with a temperature control accuracy of up to ±0.1℃, widely applied in the semiconductor industry.
fltz series
-45°C
최저
90°C
최고
±0.1℃
온도 제어 정확도
Contact LNEYA sales engineer for catalog or price.
| 모델 | FLTZ-002 FLTZ-002W |
FLTZ-003 FLTZ-003W |
FLTZ-004 FLTZ-004W |
FLTZ-006 FLTZ-006W |
FLTZ-008 FLTZ-008W |
FLTZ-010 FLTZ-010W |
FLTZ-015 FLTZ-015W |
| 온도 범위 | 5℃～90℃ | ||||||
| 온도 제어 정확도 | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| 냉각수 흐름 @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| 치수 cm | 95*38*106 | 95*38*106 | 950*380*106 | 98*43*140 | 98*43*140 | 108*60*150 | 108*60*150 |
| 모델 | FLTZ-202 FLTZ-202W |
FLTZ-203 FLTZ-203W |
FLTZ-204 FLTZ-204W |
FLTZ-206 FLTZ-206W |
FLTZ-208 FLTZ-208W |
FLTZ-210 FLTZ-210W |
FLTZ-215 FLTZ-215W |
| 온도 범위 | -25℃～90℃ | ||||||
| 온도 제어 정확도 | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||||||
| 흐름 최대 | 10~25L/min | 15～45L/min | 25～75L/min | ||||
| Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated fluid, glycol-water solution, etc. | ||||||
| 냉각수 흐름 @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
| 치수 cm | 95*38*106 | 95*38*106 | 95*38*106 | 98*43*140 | 98*43*140 | 108*60*150 | 108*60*150 |
| 모델 | FLTZ-402 FLTZ-402W |
FLTZ-403 FLTZ-403W |
FLTZ-404 FLTZ-404W |
FLTZ-406 FLTZ-406W |
FLTZ-408 FLTZ-408W |
FLTZ-410 FLTZ-410W |
FLTZ-415 FLTZ-415W |
| 온도 범위 | -45℃～90℃ | ||||||
| 온도 제어 정확도 | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||||||
| 흐름 최대 | 10～25L/min 5bar max | 15～45L/min 5bar max | 25～75L/min 5bar max | ||||
| 난방 | Uses compressor heat to prevent condenser frost. | ||||||
| Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| 냉매 | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated fluid, glycol-water solution, etc. | ||||||
| 냉각수 흐름 @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
| 치수 cm | 95*38*106 | 95*38*106 | 95*38*106 | 98*43*140 | 98*43*140 | 108*50*150 | 108*50*150 |
| 모델 | FLTZ-803W | FLTZ-805W | FLTZ-806W | FLTZ-808W | FLTZ-810W |
| 온도 범위 | -80℃～+90℃ | ||||
| 온도 제어 정확도 | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||||
| 흐름 최대 | 7～25L/min 5bar | 12～45L/min 6bar | |||
| Cooling capacity @-70℃ | 0.6kW | 1kW | 1.5kW | 2kW | 3kW |
| 난방 용량 | 2kW | 2kW | 2kW | 3.5kW | 3.5kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L |
| 확장 탱크 용량 | 10L | 10L | 15L | 15L | 20L |
| 냉매 | Fluorinated fluids | ||||
| 냉각수 흐름 @20℃ | 1.8m3/h | 2.5m3/h | 3m3/h | 5m3/h | 6m3/h |
| Circuit Breakers | 25A | 25A | 32A | 40A | 50A |
| 모델 | FLTZ-1002W | FLTZ-1004W |
| 온도 범위 | -100℃～+90℃ | |
| 온도 제어 정확도 | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | |
| 흐름 제어 | 7~25L/min | 12~45L/min |
| Cooling capacityat-90℃ | 1.5kW | 3kW |
| 난방 용량 | 3.5kW | 5.5kW |
| Internal circulating fluid volume | 5L | 8L |
| 확장 탱크 용량 | 10L | 15L |
| Heat-conduction medium | 불소화 액체 | |
| Cooling water@20℃ | 50L/min 2bar~7bar | 100L/min 2bar~7bar |
|
모델 |
FLTZ-001S |
FLTZ-002S |
FLTZ-003S |
FLTZ-004S |
FLTZ-006S |
FLTZ-008WS |
FLTZ-010WS |
|
온도 범위 |
15℃～25℃ |
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|
온도 제어 정확도 |
±0.005℃ Temperature control accuracy at the equipment outlet |
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|
Flow Rate |
7L/min 3bar |
15L/min at 4bar |
30L/min at 4bar |
75L/min at 4bar |
|||
|
난방 전력 |
Technology of using compressor heating to prevent condenser frosting |
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|
냉각 용량 @20℃ |
3kw |
7kw |
10.5kw |
14 kw |
21kw |
28kw |
35kw |
|
Liquid Storage Capacity |
8L |
15L |
20L |
30L |
50L |
60L |
80L |
|
냉매 |
R1234fa （ODP=0 GWP=4） |
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|
Secondary Refrigerant(Coolant) |
Purified Water |
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Single-channel chillers are primarily used for precise temperature control in semiconductor production and testing. The company utilizes multiple algorithms (PID, feedforward PID, and model-free self-building tree algorithms) to achieve fast response and high control accuracy.
Under load, the system offers high temperature control accuracy, allowing for flexible switching between -100°C and +90°C with excellent temperature compliance. Advanced low-temperature refrigeration technology supports ultra-low temperature control from -100°C to -80°C.
Single Channel Chiller Applications
Why Choose LNEYA® ?
The semiconductor industry has very strict requirements on temperature control accuracy. Many process steps are extremely sensitive to temperature changes. The performance and quality of the products rely on high-precision semiconductor chillers. LNEYA provides professional thermal management solutions for the semiconductor industry.
매우 넓은 온도 범위로 액체 매체를 교체할 필요가 없습니다;
효율적인 생산 안정성 및 반복성 결과;
고온 냉각 기술, 압축기를 직접 시동하여 300℃에서 냉각합니다.
완전 밀폐형 시스템으로 열 전도성 액체의 수명을 연장합니다;
판형 열교환기와 파이프라인 히터를 사용하여 냉각 및 난방 속도를 개선합니다;
Contact LNEYA® chiller sales
Representative to obtain a standard product catalog and sample book for semiconductor chillers, or customize your chiller.
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