High Temperature /CVD Chiller

For semiconductor thin-film deposition processes

FLTZH 50℃~220℃

Temperature accuracy ±0.1℃(optional ±0.01°C)

Compatible with chucks

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FLTZH High Temperature Chiller (Image 1)

LNEYA’s High Temperature chiller Key Benefits

FLTZH High Temperature Chiller (Image 2)

Wide High-Temperature Range: Outlet temperature up to 300°C.
Precise Temperature Control: Employs intelligent algorithms to achieve rapid dynamic temperature response with a control accuracy of ±0.1°C (optional ±0.01°C), ensuring excellent temperature tracking performance.
Energy Efficiency: Utilizes frequency conversion adaptive regulation, soft start, and other technologies to achieve high efficiency and energy savings.
Low Fluorinated Fluid Loss: Special sealing and circulation design minimizes fluorinated fluid volatilization loss caused by high temperatures.
High Cleanliness: Internal pipes are pickled and passivated for high cleanliness, free from impurity ions, and do not cause any contamination to the process.

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Application of FLTZH High Temperature Chiller

Chemical Vapor Deposition
Plasma Enhanced CVD
for MOCVD Reactor
Thin Film Deposition
Cooling Solution for PECVD Chamber

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FLTZH High Temperature Chiller (Image 3)

Selection of High Temperature Chiller Specifications

FLTZH 50℃~250℃（single-channel）
FLTZH 50℃~250℃(Dual-Channel）

Model		FLTZH-5W	FLTZH-10W
Medium temp range		50℃～+220℃	50℃～+220℃
Control system		PLC controller	PLC controller
Temp Control Point Mode		Outlet temperature control mode (internal sensor)	Outlet temperature control mode (internal sensor)
Temp Control Point Mode		CHUCK Temperature Control Mode (Communication)	CHUCK Temperature Control Mode (Communication)
Temp Difference Control		Configurable temperature difference between the control setpoint and the outlet temperature	Configurable temperature difference between the control setpoint and the outlet temperature
Communication protocol		MODBUS RTU protocol RS 485 interface，Ethernet interface	MODBUS RTU protocol RS 485 interface，Ethernet interface
External temp input feedback		Via communication	Via communication
Medium outlet temp control accuracy		±0.1℃	±0.1℃
Chuck temp control accuracy		±0.5℃	±0.5℃
Heating power		5.5kW	10kW
Cooling capacity kW AT	220 ℃	5.5kW	10kW
	150 ℃	5.5kW	10kW
	100 ℃	3.5kW	6kW
	50 ℃	1.1kW	2kW
Flow/Pressure		8LPM 4bar	8LPM 4bar
Control panel		7-inch touch screen	7-inch touch screen
Safety protection		Self-diagnostic system with phase sequence protection, current monitoring, leak alarm, triple heating protection, and inlet/outlet pressure & flow interruption protection	Self-diagnostic system with phase sequence protection, current monitoring, leak alarm, triple heating protection, and inlet/outlet pressure & flow interruption protection
Closed circulation system		Fully sealed system with no oil mist at high temperature, no moisture absorption at low temperature, stable system pressure during operation, and automatic thermal fluid replenishment at low temperature	Fully sealed system with no oil mist at high temperature, no moisture absorption at low temperature, stable system pressure during operation, and automatic thermal fluid replenishment at low temperature
Connection size		ZG1/2	ZG3/4
Cooling water connection size		ZG1/2	ZG3/4
Cooling water flow		20LPM max at 25℃	35LPM max at 25℃
Shell material		Cold rolled steel powder coating(RAL7035）	Cold rolled steel powder coating(RAL7035）
Heat transfer medium		Fluorinated fluid	Fluorinated fluid
Dimensions cm		458590	55105120
Power supply		220V 3-phase 4-wire 32A	220V 3-phase 4-wire 32A

Model		FLTZH-2W-2T		FLTZH-5W-2T		FLTZH-10W-2T		FLTZH-5W-2T-HV
Medium temperature range		50℃～+220℃		50℃～+220℃		50℃～+220℃		50℃～+300℃
Control system		PLC controller
Temp Control Point Mode		Outlet temperature control mode (internal sensor)
		CHUCK Temperature Control Mode (Communication)
Temp Difference Control		Configurable temperature difference between the control setpoint and the outlet temperature
Communication protocol		MODBUS RTU protocol RS 485 interface，Ethernet interface
External temp input feedback		Via communication
Medium outlet temp control accuracy		±0.1℃
Chuck temp control accuracy		±0.5℃
Heating power		2.5kW	2.5kW	5.5kW	5.5kW	10kW	10kW	5.5kW	5.5kW
Cooling capacity kW AT	220 ℃	2.5kW	2.5kW	5.5kW	5.5kW	10kW	10kW	5.5kW	5.5kW
	150 ℃	2.5kW	2.5kW	5.5kW	5.5kW	10kW	10kW	5.5kW	5.5kW
	100 ℃	1.5kW	1.5kW	3.5kW	3.5kW	6kW	6kW	3.5kW	3.5kW
	50 ℃	0.5kW	0.5kW	1.1kW	1.1kW	2kW	2kW	1.1kW	1.1kW
Flow/Pressure		8LPM 4bar	8LPM 4bar	8LPM 4bar	8LPM 4bar	15LPM 4bar	15LPM 4bar	8LPM 4bar	8LPM 4bar
Control panel		7-inch touch screen
Safety protection		Self-diagnostic system with phase sequence protection, current monitoring, leak alarm, triple heating protection, and inlet/outlet pressure & flow interruption protection
Closed circulation system		Fully sealed system with no oil mist at high temperature, no moisture absorption at low temperature, stable system pressure during operation, and automatic thermal fluid replenishment at low temperature
Connection size		ZG1/2	ZG1/2	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG1/2	ZG1/2
Cooling water connection size		ZG1/2		ZG1/2		ZG3/4		ZG1/2
Cooling water flow		20LPM max at 25℃		40LPM max at 25℃		70LPM max at 25℃		40LPM max at 25℃
Shell material		Cold rolled steel powder coating(RAL7035）		Cold rolled steel powder coating(RAL7035）		Cold rolled steel powder coating(RAL7035）		Cold rolled steel powder coating(RAL7035）
Heat transfer medium		Fluorinated fluid		Fluorinated fluid		Fluorinated fluid		Fluorinated fluid
Dimensions cm		4585130		4585145		55105160		45110145
Power supply		220V 3-phase 4-wire 32A		220V 3-phase 4-wire 32A		220V 3-phase 4-wire 32A		220V 3-phase 4-wire 32A

Notable options:

A “W” in the model name indicates water-cooling; its absence indicates air-cooling.
Rated Test Conditions: Inlet water temperature: 15°C; Outlet water temperature: 20°C.
The ambient temperature surrounding the equipment must not exceed 26°C, and the supplied cooling water temperature must not exceed 26°C. Excessive ambient or cooling water temperatures will adversely affect the equipment’s minimum operating temperature.
The data presented in this table is for reference purposes only; please refer to the parameters listed on the unit’s nameplate as the definitive standard.
For inquiries regarding custom non-standard products, please contact our company.