High-Precision Chiller

Thermal management with lithography, coating & developing equipment

Temperature range 15℃～25℃

Temperature accuracy ±0.005℃

Ideal for ultra-precision manufacturing

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LNEYA’s High-Precision Chiller Key Benefits

High-precision temperature control ±0.005℃
PID or PLC control maintains temperature fluctuations ≤ ±0.005 °C, ideal for ultra-precision manufacturing.
Multi-application compatibility
Supports fluorinated liquids, glycol-water solutions, and DI water.
With automatic purging, refilling, and draining functions.Customizable design to meet SEMI tandards

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Application of High-Precision Chiller

For lithography processes
For coating processes
Cooling developing equipment
Precise thermal management
Laser cooling

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Selection of High-Precision Chiller Specifications

Model	FLS-001S FLS-001WS	FLS-002S FLS-002WS	FLS-003S FLS-003WS	FLS-004S FLS-004WS	FLS-006S FLS-006WS	FLS-008S FLS-008WS	FLS-010S FLS-010WS
Temperature range	15℃～25℃
Control mode	Outlet temperature control mode (internal sensor)
Control mode	Workload temperature control (optional)
Outlet temp control accuracy	±0.005℃（Outlet temperature stability）
Process temp control	The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm (dynamic temperature control)
Cooling water @20℃	2.5kW	6kW	9kW	10kW	15kW	20kW	25kW
Refrigerating medium	Fluorinated fluid, ethylene glycol aqueous solution, purified water, DI water, etc.
Medium flow/pressure	15LPM@3bar	15LPM@3bar	30LPM@3bar	30LPM@3bar	30LPM@3bar	30LPM@5bar	30LPM@5bar
Medium connection size	RC1/2	RC1/2	RC1/2	RC1/2	RC1/2	RC3/4	RC3/4
Cooling water	0.6m³/h@23℃	1.1m³/h@23℃	1.6m³/h@23℃	2.2m³/h@23℃	3.3m³/h@23℃	4.4m³/h@23℃	5.5m³/h@23℃
Cooling water connection size	RC3/8	RC1/2	RC1/2	RC1/2	RC1/2	RC3/4	RC1
Expansion tank volume	10L	10L	10L	15L	15L	20L	25L
Flow control	15LPM~25LPM	15LPM~25LPM	15LPM~25LPM	15LPM~30LPM	15LPM~30LPM	15LPM~30LPM	20LPM~50LPM
Flow display accuracy	±0.5LPM
Control panel	7-inch color touch screen
Safety protection	Self-diagnostic system with phase loss, over/under voltage and current protection, leak alarm, triple heating protection, and inlet/outlet pressure & flow monitoring
Communication Protocol	MODBUS RTU/TCP protocol or ETHERCAT、LONWORKS etc.
Installation environment	No corrosive or flammable gas 30-70%(No condensation)
Power supply	220 VAC ± 10%，1PH(Customizable)/220 VAC ± 10%，3PH(Customizable)/380 VAC ± 10%，3PH(Customizable)			380 VAC ± 10%，3PH(Customizable)/220 VAC ± 10%，3PH(Customizable)
Total power consumption（max）	2kW	3.5kW	4.5kW	5kW	7kW	10.5kW	12.5kW
Shell material	Cold rolled steel powder coating(RAL7035）
Water-cooled dimensions cm	4080100	4080115	5095130	5095130	50100140	80100165	90110165

Points to Note：

Rated test conditions: dry-bulb 20 °C; wet-bulb 16 °C.
Data are for selection reference only and subject to change without notice; nameplate parameters prevail.
For special non-standard customization please contact us.
Water-cooled units require a closed cooling tower or chiller water supply. If an open cooling tower is used a filter must be installed. Supply pressure: 1.5–4 bar.