Ultra Pure Water Chiller/UPW Chiller

Precision Cooling for Semiconductor & Cleanroom Applications

Temperature range 15℃~40℃

Temperature accuracy ±0.1℃

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LNEYA’s Ultrapure Water Chiller Key Advantages

High Purity: An internal filter effectively prevents scale formation, thereby reducing free-ion contamination at the source. This protects the core components of the cooling system and significantly enhances operational efficiency.
Reduced Conductivity: It lowers the electrical conductivity of the cooling water, preventing current leakage and avoiding electrochemical interference that could compromise precision electronic components or manufacturing processes.
Precise Temperature Control: Employing intelligent algorithms, the system achieves rapid dynamic temperature response with a control accuracy of ±0.1°C (upgradeable to ±0.01°C), demonstrating excellent temperature-following capabilities.
Energy Efficiency: By incorporating variable-frequency adaptive control for the compressor and pump, soft-start technology, and waste heat recovery techniques, the system achieves highly efficient and energy-saving operation.
No Freon Cleaning Required；Single / Dual Channel；High Purity Compatible Design

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Application of UPW Chiller

This chiller can replace freon-based cleaning and is widely used in precision cleaning with ultrapure water in the production of semiconductor wafers, photovoltaic cells, LCD panels, and lithium batteries.

Wafer cleaning
Post-etching cleaning
Post-CMP cleaning
Solar cell cleaning
LCD panel cleaning
Display substrate processing
Lithium-ion battery electrode material cleaning
Precision component processing
PCB cleaning
Optical component testing

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Selection of ultra pure water (UPW) Chiller Specifications

Model		FLTZ-U-003W	FLTZ-U-D001W		FLTZ-U-D002W		FLTZ-U-D003W
Channel type		1-loop independent	2-loop independent		2-loop independent		2-loop independent
Performance Parameters	Channel Model	CH1	CH1	CH2	CH1	CH2	CH1	CH2
	Circulation Mode	Flushing type	Circulation Type	Circulation Type	Circulation Type	Flushing type	Circulation Type	Flushing type
	Temperature Range	15~40℃	15~40℃	15~40℃	15~40℃	15~40℃	15~40℃	15~40℃
	Temperature Control Accuracy	±0.1℃	±0.1℃	±0.1℃	±0.1℃	±0.1℃	±0.1℃	±0.1℃
	Cooling Capacity	9.4kW@20℃	0.6kW@20℃	0.6kW@20℃	1.5kW@20℃	6.3kW@20℃	3kW@20℃	6.2kW@20℃
	Heating power	10kW	0.6kW	2kW	1.5kW	12.5kW	3kW	12.5kW
	Circulating liquid type/resistivity	DI WATER@10~18MΩ·cm	DI WATER@10~18MΩ·cm		DI WATER@10~18MΩ·cm		DI WATER@10~18MΩ·cm
	Circulating liquid flow/pressure	45LPM@0.4MPa	6LPM@0.45MPa	10LPM@0.43MPa	15LPM@0.45MPa	25LPM@0.43MPa	18LPM@0.45MPa	30LPM@0.43MPa
	Circulating liquid connection size	RC3/4	RC3/8	RC3/8	RC1/2	RC1/2	RC1/2	RC3/4
	PCW temp	18~22℃	18~22℃	18~22℃	18~22℃	18~22℃	18~22℃	18~22℃
	PCW flow	2m3/h	1.3m3/h		2m3/h		3.8m3/h
	PCW pressure	2~6bar	2~6bar	2~6bar	2~6bar	2~6bar	2~6bar	2~6bar
	PCW connection size	RC3/4	RC1/2		RC1/2		RC3/4
Safety protection	Overload protection	Thermal overload protection for compressor, circulation pump, and heater
	Power supply protection	Overcurrent, over/under voltage, phase-loss and etc. protection
	Liquid level protection	Low flow 、 low liquid level protection etc.
	Safety interlock	EMO+INTERLOCK
	Lockable tag device	LOTO device
	Leak detection device	Internal and external LEAK SENSON
Communication protocol	Supports multiple communication protocols	MODBUS RTU/TCP protocol or ETHERCAT、LONWORKS etc.
Installation environment	Ambient Temperature	10~40℃
Installation environment	Ambient Humidity	30~70%RH
Power supply		220VAC±10%，3PH(Customizable))
Dimensions cm		4590150	4390150		45120150		65115170

Notable options:

1.Rated test conditions: dry-bulb 20 °C; wet-bulb 16 °C.
2.Data are for selection reference only and subject to change without notice; nameplate parameters prevail.
3.For special non-standard customization please contact us.
4.Water-cooled units require a closed cooling tower or chiller water supply. If an open cooling tower is used a filter must be installed. Supply pressure: 1.5–4 bar.
For inquiries regarding custom non-standard products, please contact our company.