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FLTZ -80℃~90℃
Have strong cooling capacity, wide temperature control range and precise temperature control accuracy (±0.05℃), and are designed for semiconductor, aerospace and other applications.
fltz series
-80°C
최저
90°C
최고
±0.05°C
온도 제어 정확도
have unparalleled advantages in low-temperature refrigeration applications.
Contact LNEYA sales engineer for catalog or price.
| 모델 | FLTZ-803W~810W | ||||
| 온도 범위 | -80℃～+90℃ | ||||
| 온도 제어 정확도 | ±0.05℃（Steady state outlet temperature） | ||||
| 흐름 제어 | 7～45L/min 6bar max | ||||
| Cooling capacityat-70℃ | 0.6kW~3kW | ||||
| 난방 용량 | 2kW~3.5kW | ||||
| Internal circulating fluid volume | 4L~10L | ||||
| 확장 탱크 용량 | 10L~20L | ||||
| Heat-conduction medium | 불소화 액체 | ||||
| Cooling water@20℃ | 1.8m3/h~6m3/h | ||||
| 치수 cm | 550*700*1750~800*1200*1850 | ||||
The recirculating water chiller system is a fully closed circulation system. It does not absorb moisture in the air at low temperatures, and does not volatilize heat transfer media or produce oil mist at high temperatures.
Compressor hot gas heating within -40 degrees Celsius
Variable frequency pump adjusts circulating fluid pressure and flow.
Variable frequency pump adjusts circulating fluid pressure and flow.
LNEYA has been focusing on low-temperature chillers for 15 years. Refrigeration below -60℃ is our advantageous temperature range. If you need, we can do -150℃
to meet your various application needs.
to meet your various application needs.
높은 정밀도와 높은 효율성을 보장하는 열쇠
애플리케이션
FLTZ -80℃~90℃
recirculating water chillers are often used in the front-end and back-end processes of semiconductors due to their excellent cooling capacity.
Lon implantation is an important process in semiconductor manufacturing for adjusting the electrical properties of materials. This process requires strict temperature control to ensure the depth and distribution accuracy of ion implantation. FLTZ -80℃~90℃ recirculating water chillers can provide a stable temperature environment to improve implantation accuracy.
Wafers need to be kept in a specific temperature range during the lithography and etching processes. FLTZ -80℃~90℃
recirculating water chillers can provide a stable low or high temperature environment to avoid temperature fluctuations affecting process effects.
Semiconductor components will experience extreme temperature differences in actual use, so their reliability needs to be tested through thermal cycle tests.Recirculating water chillers can provide a temperature range of -80℃ to 90℃, simulating temperature fluctuations in actual working environments and testing the temperature resistance and stability of semiconductor components.
Other models for semiconductor industry
Thermal chillers
Temp range 5~90℃
온도 정확도 ±0.05℃
Process chillers
Temp range -25~90℃
온도 정확도 ±0.05℃
Low temperature chillers
Temp range -45~90℃
온도 정확도 ±0.05℃
Recirculation chillers
Temp range -100~90℃
온도 정확도 ±0.05℃
You can trust our Semiconductor chiller factory
General chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, etc. as heat transfer media, while FLTZ -80℃~90℃ circulating water chillers use fluorinated liquid. This is because fluorinated liquid evaporates faster and is non-flammable, has better cooling effect and higher safety, and is often used for semiconductor process cooling.Get in touch with our Recirculating Water chiller experts
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